Soft Lithography

1999
R. J. Jackman, D. C. Duffy, O. Cherniavskaya, and G. M. Whitesides. 1999. “Using Elastomeric Membranes as Dry Resists and for Dry Lift-Off.” Langmuir, 15, Pp. 2973-2984. PDF
655
T. Deng, J. Tien, B. Xu, and G. M. Whitesides. 1999. “Using Patterns in Microfiche as Photomasks in 10-mm-Scale Microfabrication.” Langmuir, 15, Pp. 6575-6581. PDF

672

1998
R. J. Jackman, S. T. Brittain, A. Adams, M. G. Prentiss, and G. M. Whitesides. 1998. “Design and Fabrication of Topologically Complex, Three-Dimensional Microstructures.” Science, 280, Pp. 2089-2091. PDF
613
R. J. Jackman, D. C. Duffy, E. Ostuni, N. D. Willmore, and G. M. Whitesides. 1998. “Fabricating Large Arrays of Microwells with Arbitrary Dimensions and Filling Them Using Discontinuous Dewetting.” Analytical Chemistry, 70, Pp. 2280-2287. PDF
612
C. Marzolin, S. P. Smith, M. G. Prentiss, and G. M. Whitesides. 1998. “Fabrication of Glass Microstructures by Micro-Molding of Sol-Gel Precursors.” Advanced Materials, 10, Pp. 571-574. PDF
586
X-M. Zhao, Y. Xia, O. J. A. Schueller, D. Qin, and G. M. Whitesides. 1998. “Fabrication of microstructures using shrinkable polystyrene films.” Sensor Actuat. A-Phys., 65, Pp. 209-217. PDF
601
N. L. Jeon, J. Hu, G. M. Whitesides, M.K. Erdhardt, and R.G. Nuzzo. 1998. “Fabrication of Silicon MOSFETs Using Soft Lithography.” Advanced Materials, 10, Pp. 1466-1469. PDF
617
R. J. Jackman, S. T. Brittain, and G. M. Whitesides. 1998. “Fabrication of Three-Dimensional Microstructures by Electrochemically Welding Structures Formed by Microcontact Printing on Planar and Curved Substrates.” J. MEMS, 7, Pp. 261-266. PDF
597
J. A. Rogers, K. E. Paul, R. J. Jackman, and G. M. Whitesides. 1998. “Generating ~90 nanometer features using near-field contact-mode photolithography with an elastomeric phase mask.” J. Vac. Sci. Technol. B, 16, Pp. 59-68. PDF
596
B. A. Grzybowski, R. Haag, N. B. Bowden, and G. M. Whitesides. 1998. “Generation of Micrometer-Sized Patterns for Microanalytical Applications Using a Laser Direct-Write Method and Microcontact Printing.” Analytical Chemistry, 70, Pp. 4645-4652. PDF
625
P. Yang, T. Deng, D. Zhao, P. Feng, D. Pine, B. F. Chmelka, G. M. Whitesides, and G. D. Stucky. 1998. “Hierarchically Ordered Oxides.” Science, 282, Pp. 2244-2246. PDF
626
J. Aizenberg, J. A. Rogers, K. E. Paul, and G. M. Whitesides. 1998. “Imaging profiles of light intensity in the near field: applications to phase-shift photolithography.” Applied Optics, 37, Pp. 2145-2152. PDF
602
K. E. Paul, T. L. Breen, J. Aizenberg, and G. M. Whitesides. 1998. “Maskless Lithography: Embossed Photoresist as its Own Optical Element.” Applied Physics Letters, 73, Pp. 2893-2895. PDF
624
J. Tien, Y. Xia, and G. M. Whitesides. 1998. “Microcontact Printing of SAMs.” In Thin Films, edited by A. Ulman, Pp. 24, 227-253. New York: Academic Press. PDF

590

D. Qin, Y. Xia, J. A. Rogers, R. J. Jackman, X-M. Zhao, and G. M. Whitesides. 1998. “Microfabrication, Microstructures and Microsystems.” In Microsystem Technology in Chemistry and Life Sciences, edited by A. Manz and H. Becker, 194: Pp. 1-20. Berlin: Springer-Verlag. PDF
581
L. Yan, X-M. Zhao, and G. M. Whitesides. 1998. “Patterning a Preformed, Reactive SAM Using Microcontact Printing.” J. Am. Chem. Soc., 120, Pp. 6179-6180. PDF
618
C. Marzolin, A. Terfort, J. Tien, and G. M. Whitesides. 1998. “Patterning of a polysiloxane precursor to silicate glasses by microcontact printing.” Thin Solid Films, 315, Pp. 9-12. PDF
587
A Karim, J. F. Douglas, B. P. Lee, S. C. Glotzer, J. A. Rogers, R. J. Jackman, E. J. Amis, and G. M. Whitesides. 1998. “Phase separation of ultrathin polymer-blend films on patterned substrates.” Phys. Rev. E., 57, Pp. R6273-R6276. PDF
588
D. Qin, Y. Xia, A. J. Black, and G. M. Whitesides. 1998. “Photolithography with transparent reflective photomasks.” J. Vac. Sci. Technol. B, 16, Pp. 98-103. PDF
583
J. A. Rogers, K. E. Paul, and G. M. Whitesides. 1998. “Quantifying distortions in soft lithography.” J. Vac. Sci. Technol. B, 16, Pp. 88-97. PDF
589

Pages