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Composite Ferromagnetic Photoresist for the Fabrication of Microelectromechanical Systems

Citation:

N. Damean, B. A. Parviz, J. Lee, T.W. Odom, and G. M. Whitesides. 2004. “Composite Ferromagnetic Photoresist for the Fabrication of Microelectromechanical Systems.” Journal of Micromechanics and Microengineering, 15, Pp. 29-34.
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See also: MATERIALS SCIENCE, Microfluidics, Devices, Soft Lithography, Devices and Structures, Micromolding, Unconventional Nano- and microfabrication, Shadow-sphere Lithography
Last updated on 12/19/2018