@article {1340239,
	title = {Fabrication of GaAs/AlGaAs High Electron Mobility Transistors with 250 nm Gates Using Conformal Phase Shift Lithography},
	journal = {Sensor Actuat. A-Phys.},
	volume = {86},
	year = {2000},
	note = {690},
	pages = {122-126},
	keywords = {AMC1727},
	author = {Hu, J. and Deng, T. and Beck, R. G. and R. M. Westervelt and K. D. Maranowski and A. C. Gossard and Whitesides, G. M.}
}
