@article {1340360, title = {Generation of Chrome Masks with Micrometer-Scale Features using Microlens Lithography}, journal = {Advanced Materials}, volume = {14}, year = {2002}, note = {811}, month = {4/21/02}, pages = {1213-1216}, keywords = {accepted w/minor revisions 6/03/02, AM-C 3933}, author = {Wu, H. and Odom, T.W. and Whitesides, G. M.} }