@article {1340673, title = {Pattern Transfer to Silicon by Microcontact Printing and RIE}, journal = {Nanotechnology}, volume = {7}, year = {1996}, note = {516}, pages = {447-451}, author = {Whidden, T. K. and Ferry, D. K. and Kozicki, M. N. and Kim, E. and Kumar, A. and Wilbur, J.L. and Whitesides, G. M.} }