@article {1340728, title = {Fabrication and Characterization of Glassy Carbon MEMS}, journal = {Chem. Mat.}, volume = {9}, year = {1997}, note = {571}, pages = {1399-1406}, author = {Schueller, O. J. A. and Brittain, S. T. and Marzolin, C. and Whitesides, G. M.} }