@article {1340740,
	title = {Photolithography with transparent reflective photomasks},
	journal = {J. Vac. Sci. Technol. B},
	volume = {16},
	year = {1998},
	note = {583},
	pages = {98-103},
	author = {Qin, D. and Xia, Y. and Black, A. J. and Whitesides, G. M.}
}
