%0 Journal Article %J Nature Protocol %D 2010 %T Soft Lithography for Micro- and Nanoscale Patterning %A Qin, D. %A Xia, Y. %A Whitesides, G. M. %B Nature Protocol %V 5 %P 491-502 %8 7/09 %G eng %L 1079 %F s/286