%0 Book Section %B Microsystem Technology in Chemistry and Life Sciences %D 1998 %T Microfabrication, Microstructures and Microsystems %A Qin, D. %A Xia, Y. %A Rogers, J. A. %A Jackman, R. J. %A Zhao, X-M. %A Whitesides, G. M. %E Manz, A. %E Becker, H. %B Microsystem Technology in Chemistry and Life Sciences %I Springer-Verlag %C Berlin %V 194 %P 1-20 %G eng %L 581 %F 581