%0 Journal Article %J J. Vac. Sci. Technol. B %D 1998 %T Photolithography with transparent reflective photomasks %A Qin, D. %A Xia, Y. %A Black, A. J. %A Whitesides, G. M. %B J. Vac. Sci. Technol. B %V 16 %P 98-103 %G eng %L 583 %F 583