%0 Journal Article %J Sensor Actuat. A-Phys. %D 1999 %T Fabrication of Glassy Carbon Microstructures by Soft Lithography %A Schueller, O. J. A. %A Brittain, S. T. %A Whitesides, G. M. %B Sensor Actuat. A-Phys. %V 72 %P 125-139 %G eng %L 633 %! Sensors and Actuators A: Physical %F 626