Citation:H. Wu, T.W. Odom, and G. M. Whitesides. 2002. “Generation of Chrome Masks with Micrometer-Scale Features using Microlens Lithography.” Advanced Materials, 14, Pp. 1213-1216.Download CitationBibTex Tagged XML Download PDF297 KB Notes:811See also: MATERIALS SCIENCE, Materials, PDMS, Silicon, Polymers: PDMS, Conducting Solids, AMPs, PDMS, Unconventional Nano- and microfabrication, Microlens LithographyLast updated on 01/08/2019