Citation:J. Aizenberg, J. A. Rogers, K. E. Paul, and G. M. Whitesides. 1998. “Imaging profiles of light intensity in the near field: applications to phase-shift photolithography.” Applied Optics, 37, Pp. 2145-2152.Download CitationBibTex Tagged XML Download PDF4.32 MB Notes:602See also: MATERIALS SCIENCE, Soft Lithography, Micromolding, Optical SystemsLast updated on 01/22/2019