Citation:K. E. Paul, T. L. Breen, J. Aizenberg, and G. M. Whitesides. 1998. “Maskless Lithography: Embossed Photoresist as its Own Optical Element.” Applied Physics Letters, 73, Pp. 2893-2895.Download CitationBibTex Tagged XML Download PDF500 KB Notes:624See also: MATERIALS SCIENCE, Materials, Polymers: PDMS, Conducting Solids, AMPs, PDMS, Soft Lithography, Micromolding, Unconventional Nano- and microfabrication, IndentationLast updated on 01/15/2019