Nanometer scale patterning and pattern transfer on amorphous Si, crystalline Si, and SiO2 surfaces using self-assembled monolayers

Citation:

D. Wang, S. G. Thomas, K. L. Wang, Y. Xia, and G. M. Whitesides. 1997. “Nanometer scale patterning and pattern transfer on amorphous Si, crystalline Si, and SiO2 surfaces using self-assembled monolayers.” Applied Physics Letters, 70, Pp. 1593-1595.
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Last updated on 01/23/2019