Self-assembled monolayers exposed by metastable argon and metastable helium for neutral atom lithography and atomic beam imaging

Citation:

A. Bard, K. K. Berggren, J.L. Wilbur, J. D. Gillaspy, S. L. Rolston, J. J. McClelland, W. D. Phillips, M. G. Prentiss, and G. M. Whitesides. 1997. “Self-assembled monolayers exposed by metastable argon and metastable helium for neutral atom lithography and atomic beam imaging.” J. Vac. Sci. Technol. B, 15, Pp. 1805-1810.
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Last updated on 02/15/2019