Microlens Lithography

2016
M. Gonidec, M. M. Hamedi, A. Nemiroski, L. M. Rubio, C. Torres, and G. M. Whitesides. 2016. “Fabrication of Nonperiodic Metasurfaces by Microlens Projection Lithography.” Nano Letters, 16, Pp. 4125-4132.Abstract
2.6.3
PDF

1281

2005
N. Damean, S. K. Sia, V. Linder, M. Narovlyansky, and G. M. Whitesides. 2005. “Space- and Time-Resolved Spectrophotometry in Microsystems.” PNAS, 102, Pp. 10035-10039. PDF
920
2003
M-H. Wu, C. Park, and G. M. Whitesides. 2003. “Generation of Submicrometer Structures by Photolithography Using Arrays of Spherical Microlenses.” Journal of Colloid and Interface Science, 265, Pp. 304-309. PDF
852
2002
H. Wu, T.W. Odom, and G. M. Whitesides. 2002. “Connectivity of Features in Microlens Array Reduction Photolithography: Generation of Different Patterns Using a Single Photomask.” J. Am. Chem. Soc., 124, Pp. 7288-7289. PDF
794
M-H. Wu, C. Park, and G. M. Whitesides. 2002. “Fabrication of Arrays of Microlenses with Controlled Profiles Using Gray-Scale Microlens Projection Photolithography.” Langmuir, 18, Pp. 9312-9318. PDF
804
M-H. Wu and G. M. Whitesides. 2002. “Fabrication of Diffractive and Micro-optical Elements Using Microlens Projection Lithography.” Advanced Materials, 14, Pp. 1502-1506. PDF
816
M-H. Wu, K. E. Paul, J. Yang, and G. M. Whitesides. 2002. “Fabrication of Frequency-Selective Surfaces Using Microlens Photolithography.” Appl. Phys. Letters, 80, Pp. 3500-3502. PDF
789
M-H. Wu and G. M. Whitesides. 2002. “Fabrication of Two-Dimensional Arrays of Microlenses and Their Applications in Photolithography.” Journal of Micromechanics and Microengineering, 12, Pp. 747-758. PDF
820
H. Wu, T.W. Odom, and G. M. Whitesides. 2002. “Generation of Chrome Masks with Micrometer-Scale Features using Microlens Lithography.” Advanced Materials, 14, Pp. 1213-1216. PDF
811
G. M. Whitesides. 2002. “Organic Materials Science.” Materials Research Society Bulletin, 27, Pp. 56-65. PDF
814
M-H. Wu, K. E. Paul, and G. M. Whitesides. 2002. “Patterning Flood Illumination Using Microlens Arrays.” Appl. Optics, 41, Pp. 2575-2585. PDF
801
H. Wu, T.W. Odom, and G. M. Whitesides. 2002. “Reduction Photolithography Using Microlens Arrays: Applications in Grayscale Photolithography.” Analytical Chemistry, 74, Pp. 3267-3273. PDF
800
1996
J.L. Wilbur, R. J. Jackman, G. M. Whitesides, E. Cheng, L. Lee, and M. G. Prentiss. 1996. “Elastomeric Optics.” Chem. Mat., 8, Pp. 1380-1385. PDF
499
1994
H. A. Biebuyck and G. M. Whitesides. 1994. “Self-Organization of Organic Liquids on Patterned Self-Assembled Monolayers of Alkanethiolates on Gold.” Langmuir, 10, Pp. 2790-2793. PDF
420