Citation:D. Qin, Y. Xia, A. J. Black, and G. M. Whitesides. 1998. “Photolithography with transparent reflective photomasks.” J. Vac. Sci. Technol. B, 16, Pp. 98-103.Download CitationBibTex Tagged XML Download PDF1007 KB Notes:583See also: MATERIALS SCIENCE, Materials, PDMS, Microfluidics, PDMS, Polymers: PDMS, Conducting Solids, AMPs, PDMS, Soft Lithography, Microcontact PrintingLast updated on 01/22/2019